表面形貌的光学测量 影印版2025|PDF|Epub|mobi|kindle电子书版本百度云盘下载

表面形貌的光学测量 影印版PDF格式电子书版下载

注意：本站所有压缩包均有解压码： 点击下载压缩包解压工具

1 Introductionto SurfaceTexture Measurement1

RichardLeach1

1.1 Surface Texture Measurement1

1.2 Surface Profile and Areal Measurement2

1.3 Areal Surface Texture Measurement2

1.4 Surface Texture Standards and GPS3

1.4.1 Profile Standards3

1.4.2 Areal Specification Standards4

1.5 InstrumentTypes in the ISO 25178 Series5

1.5.1 The Stylus Instrument7

1.5.2 Scanning Probe Microscopes8

1.5.3 Scanning Electron Microscopes9

1.5.4 Optical Instrument Types9

1.6 Considerations When Choosing a Method10

Acknowledgements11

References11

2 Some Common Terms and Definitions15

RichardLeach15

2.1 Introduction15

2.2 The Principal Aberrations15

2.3 Obiective Lenses17

2.4 Magnification and Numerical Aperture18

2.5 Spatial Resolution19

2.6 Optical Spot Size20

2.7 Field of View21

2.8 Depth of Field and Depth ofFocus21

2.9 Interference Objectives22

Acknowledgements22

References22

3 Limitations of Optical 3D Sensors23

Gerd H？usler,Svenja Ettl23

3.1 Introduction:What Is This Chapter About?23

3.2 The Canonical Sensor24

3.3 Optically Rough and Smooth Surfaces25

3.4 Type Ⅰ Sensors:Triangulation27

3.5 Type Ⅱ and Type Ⅲ Sensors:Interferometry33

3.6 Type Ⅳ Sensors:Deflectometry38

3.7 Only Four Sensor Principles?42

3.8 Conclusion and Open Questions43

References45

4 Calibration of Optical Surface Topography Measuring Instruments49

Richard Leach,Claudiu Giusca49

4.1 Introduction to Calibration and Traceabilitv49

4.2 Calibration of Surface Topography Measuring Instruments50

4.3 Can an Optical Instrument Be Calibrated?51

4.4 Types ofMaterial Measure52

4.5 Calibration of Instrument Scales54

4.5.1 Noise56

4.5.2 Residual F1atness58

4.5.3 Amplification,Linearity and Squareness of the Scales59

4.5.4 Resolution63

4.6 Relationship between the Calibration,Adjustment and Measurement Uncertainty66

4.7 Summary67

Acknowledgements68

References69

5 Chromatic Confocal Microscopy71

Francois Blateyron71

5.1 Basic Theory71

5.1.1 Confocal Setting72

5.1.2 Axial Chromatic Dispersion73

5.1.3 Spectral Decoding75

5.1.4 Height Detection76

5.1.5 Metrological Characteristics77

5.1.5.1 Spot Size77

5.2 Instrumentation78

5.2.1 Lateral Scanning Configurations78

5.2.1.1 Profile Measurement78

5.2.1.2 Areal Measurement80

5.2.2 Optoelectronic Controller81

5.2.3 Optical Hcad83

5.2.4 Light Source84

5.2.5 Chromatic Obiective85

5.2.6 Spectrometer86

5.2.7 Optical Fibre Cord87

5.3 Instrument Use and Good Practice87

5.3.1 Calibration87

5.3.1.1 Calibration ofDark Level87

5.3.1.2 Linearisation ofthe Response Curve88

5.3.1.3 Calibration of the Height Amplification Coefficient90

5.3.1.4 Calibration ofthe Lateral Amplification Coefficient90

5.3.1.5 Calibration ofthe Hysteresis in Bi-directional Measurement90

5.3.2 Preparation for Measurement91

5.3.3 Pre-processing91

5.4 Limitations of the Technique91

5.4.1 Local Slopes91

5.4.2 Scanning Speed94

5.4.3 Light Intensity94

5.4.4 Non-measured Points94

5.4.5 Outliers95

5.4.6 Interference96

5.4.7 Ghost Foci96

5.5 Extensions of the Basic Principles97

5.5.1 Thickness Measurement97

5.5.2 Line and Field Sensors99

5.5.3 Absolute Reference99

5.6 Case Studies100

Acknowledgements105

References105

6 Point Autofocus Instruments107

Katsuhiro Miura,Atsuko Nose107

6.1 Basic Theory107

6.2 Instrumentation112

6.3 Instrument Use and Good Practice114

6.3.1 Comparison with Roughness Material Measures114

6.3.2 Three-Dimensional Measurement of Grinding Wheel SurfaceTopography117

6.4 Limitations of PAI118

6.4.1 Lateral Resolution118

6.4.2 Vertical Resolution119

6.4.3 The Maximum Acceptable Local Surface Slope120

6.5 Extensions of the Basic Principles122

6.6 Case Studies126

6.7 Conclusion128

References128

7 Focus Variation Instruments131

Franz Helmli131

7.1 Introduction131

7.2 Basic Theory131

7.2.1 How Does It Work?131

7.2.2 Acquisition of Image Data133

7.2.3 Measurement of 3D Information133

7.2.4 Post-processing137

7.2.5 Handling of Invalid Points139

7.3 Difference to Other Techniques139

7.3.1 Difference to Imaging Confocal Microscopy140

7.3.2 Difference to Point Auto Focusing Techniques140

7.4 Instrumentation140

7.4.1 Optical System141

7.4.2 CCD Sensor141

7.4.3 Light Source142

7.4.4 Microscope Objective144

7.4.5 Driving Unit144

7.4.6 Practical Instrument Realisation145

7.5 Instrument Use and Good Practice148

7.6 Limitations of the Technology153

7.6.1 Translucent Materials153

7.6.2 Measurable Surfaces153

7.7 Extensions of the Basic Principles154

7.7.1 Repeatability Information154

7.7.2 High Radiometric Data Acquisition155

7.7.3 2D Alignment156

7.7.4 3D Alignment157

7.8 Case Studies160

7.8.1 Surface Texture Measurement of Worn Metal Parts160

7.8.2 Form Measurement of Complex Tap Parameters162

7.9 Conclusion166

Acknowledgements166

References166

8 Phase Shifting Interferometry167

Peterde Groot167

8.1 Concept and Overview167

8.2 Principles of Surface Measurement Interferometry168

8.3 Phase Shifting Method171

8.4 Phase Unwrapping173

8.5 Phase Shifting Error Analysis174

8.6 Interferometer Design175

8.7 Lateral Resolution178

8.8 Focus181

8.9 Light Sources182

8.10 Calibration183

8.11 Examples of PSI Measurement184

References185

9 Coherenee Scanning Interferometry187

Peterde Groot187

9.1 Concept and Overview187

9.2 Terminology189

9.3 Typical Configurations of CSI190

9.4 Signal Formation191

9.5 Signal Processing197

9.6 Foundation Metrics and Height Calibration for CSI201

9.7 Dissimilar Materials201

9.8 Vibrational Sensitivity202

9.9 Transparent Films203

9.10 Examples205

9.11 Conclusion206

References206

10 Digital Holographic Microscopy209

Tristan Colomb,Jonas Kühn209

10.1 Introduction209

10.2 Basic Theory210

10.2.1 Acquisition211

10.2.2 Reconstruction211

10.3 Instrumentation214

10.3.1 Light Source215

10.3.2 Digital Camera216

10.3.3 Microscope Obiective216

10.3.4 Optical Path Retarder216

10.4 Instrument Use and Good Practice217

10.4.1 Digital Focusing217

10.4.2 DHM Parameters218

10.4.3 Automatic Working Distance in Reflection DHM218

10.4.4 Sample Preparation and Immersion Liquids219

10.5 Limitations of DHM219

10.5.1 Parasitic Interferences and Statistical Noise219

10.5.2 Height Measurement Range220

10.5.3 Sample Limitation220

10.6 Extensions of the Basic DHM Principles220

10.6.1 Multi-wavelength DHM221

10.6.1.1 Extended Measurement Range221

10.6.1.2 Mapping222

10.6.2 Stroboscopic Measurement222

10.6.3 DHM Reflectometry223

10.6.4 Infinite Focus224

10.6.5 Applications of DHM224

10.6.5.1 Topography and Defect Detection224

10.6.5.2 Roughness225

10.6.5.3 Micro-optics Characterization228

10.6.5.4 MEMS and MOEMS229

10.6.5.5 Semi-transparent Micro-structures230

10.7 Conclusions232

References232

11 Imaong Confocal Microscopy237

Roger Artigas237

11.1 Basic Theory237

11.1.1 Introduction to Imaging Confocal Microscopes237

11.1.2 Working Principle ofan Imaging Confocal Microscope238

11.1.3 Metrological Algorithm241

11.1.4 Image Formation of a Confocal Microscope242

11.1.4.1 General Description ofa Scanning Microscope242

11.1.4.2 Point Spread Function for the Limiting Case of an Infinitesimally Small Pinhole245

11.1.4.3 Pinhole Size Effect246

11.2 Instrumentation249

11.2.1 Types of Confocal Microscopes250

11.2.1.1 Laser Scanning Confocal Microscope Configuration250

11.2.1.2 Disc Scanning Confocal Microscope Configuration253

11.2.1.3 Programmable Array Scanning Confocal Microscope Configuration256

11.2.2 Objectives for Confocal Microscopy259

11.2.3 Vertical Scanning262

11.2.3.1 Motorised Stages with Optical Linear Encoders262

11.2.3.2 Piezoelectric Stages263

11.2.3.3 Comparison between Motorised and Piezoelectric Scanning Stages264

11.3 Instrument Use and Good Practice265

11.3.1 Location of an Imaging Confocal Microscope265

11.3.2 Seuing Up the Sample265

11.3.3 Setting the Right Scanning Parameters265

11.3.4 Simultaneous Detection of Confocal and Bright Field Images267

11.3.5 Sampling268

11.3.6 Low Magnification against Stitching269

11.4 Limitations of Imaging Confocal Microscopy270

11.4.1 Maximum Detectable Slope on Smooth Surfaces270

11.4.2 Noise and Resolution in Imaging Confocal Microscopes272

11.4.3 Errors in Imaging Confocal Microscopes274

11.4.3.1 0bjective Flatness Error274

11.4.3.2 Calibration of the F1atness Error275

11.4.3.3 Measurements on Thin Transparent Materials276

11.4.4 Lateral Resolution276

11.5 Measurement of Thin and Thick Film with Imaging Confocal Microscopy278

11.5.1 Introduction278

11.5.2 Thick Films278

11.5.3 Thin Films280

11.6 Case Study:Roughness Prediction on Steel Plates283

References285

12 Light Scattering Methods287

Theodore V.Vorburger,Richard Silver,RainerBrodmann,BorisBrodmann,J？rgSeewig12.1 Introduction287

12.2 Basic Theory289

12.3 Instrumentation and Case Studies295

12.3.1 Early Developments295

12.3.2 Recent Developments in Instrumentation for Mechanical Engineering Manufacture298

12.3.3 Recent Developments in Instrumentation for Semiconductor Manufacture(Optical Critical Dimension)302

12.4 Instrument Use and Good Practice308

12.4.1 SEMI MF 1048-1 109(2009) Test Method for Measuring theEffectiveSurfaceRoughness ofOpticalComponents by Total Integrated Scattering308

12.4.2 SEMI ME1392-1 109)2009)Guide for Angle-Resolved Optical Scatter Measurements on Specular or Diffuse Surfaces310

12.4.3 IS0101 10-8:2010 Optics and Photonics—Preparation of DrawingsforOpticalElementsandSystems—Part 8:Surface Texture311

12.4.4 Standards for Gloss Measurement312

12.4.5 VDA Guideline 2009,Geometrische Produktspezifikation Oberfl？chenbeschaffenheit Winkelaufgel？ste Streulichtmesstech-nik Definition,Kenngr？？en und Anwendung(Light Scattering Measurement Technique)312

12.5 Limitations ofthe Technique314

12.6 Extensions of the Basic Principles314

Acknowledgements315

References315

Index319